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Team of Terahertz Science and Technology

The laboratory for the team constitutes an important part of the “Shanghai Key Laboratory of Modern Optical Systems”, “the Center for Optical Instruments and Systems Engineering of the Ministry of Education” and “International Joint Innovation Laboratory of Terahertz Technology”. It has 300m2 of class 10000 and class 1000 super cleanroom, Terahertz network analyzer, Terahertz probe station, Terahertz quantum cascade laser, scanning electron microscope, lithography machine, inductive coupling plasma etching machine, Terahertz near field test system and Terahertz spectrum testing system.



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